Properties of high 庥 gate dielectrics Gd2O3 and Y2O3 for Si
Journal
Journal of Applied Physics
Journal Volume
89
Journal Issue
7
Pages
3920-3927
Date Issued
2001
Author(s)
Kwo, J.
Kortan, A.R.
Queeney, K.L.
Chabal, Y.J.
Opila, R.L.
Muller, D.A.
Chu, S.N.G.
Sapjeta, B.J.
Lay, T.S.
Mannaerts, J.P.
Boone, T.
Krautter, H.W.
Krajewski, J.J.
Sergnt, A.M.
Rosamilia, J.M.
Type
journal article