Computational Study of Variations in Gap Size for the Electrostatic Levitating Force of MEMS Device Using Dual BEM

Resource

Microelectronics Journal 35 (9): 739-748

Journal

Microelectronics Journal

Journal Volume

35

Journal Issue

9

Pages

739-748

Date Issued

2004

Date

2004

Author(s)

Chyuan, S.W.

Liao, Y.S.

Chen, J.T.

URI

Type

journal article

File(s)

Name

34.pdf

Size

768.31 KB

Format

Adobe PDF

Checksum

(MD5):024d8e8512320499c1f1ea9f63453b78