Precise optical surface profilometry using innovative chromatic differential confocal microscopy

Journal

Optics Letters

Journal Volume

41

Journal Issue

24

Pages

5660-5663

Date Issued

2016

Author(s)

Chen, L.-C.

Nguyen, D.T.

Chang, Y.-W.

LIANG-CHIA CHEN

DOI

10.1364/OL.41.005660

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447825

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85009399338&doi=10.1364%2fOL.41.005660&partnerID=40&md5=9c84bf391476a956aace4f3200b6a48f

SDGs

[SDGs]SDG3

[SDGs]SDG9

Type

journal article