Fabrication of a tactile Scanning Probe for Micro/Nano CMM
Date Issued
2012
Date
2012
Author(s)
Huang, Chao-Min
Abstract
In this research, a high precision tactile 3D probe is proposed. Based on suspension mechanism with a stylus, the probe is able to detect the 3D displacement on the ball tip using optical sensors. Calibrations with a nano measuring and positioning machine proved the excellent performances in the whole measuring range.
Rather than complicated fabricating processes, this probe can be made by conventional machining processes. With three miniature interferometers, this probe could fill all requirements for the basic concepts of micro-/nano- CMM.
Subjects
CMM
contact probe
suspension mechanism
Michelson interferometer
Type
thesis
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