Ellipsometric study of carbon nitride thin films with and without silicon addition
Journal
Diamond and Related Materials
Journal Volume
8
Journal Issue
2-5
Pages
618-622
Date Issued
1999
Author(s)
Chen, L. C.
Lin, H. Y.
Wong, C. S.
Chen, K. H.
Lin, S. T.
Yu, Y. C.
Wang, C. W.
Lin, E. K.
Ling, K. C.
Type
journal article