Fabrication of micromachined microwave couplers by CMOS process

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

3514

Pages

393-402

Date Issued

1998

Author(s)

Chang, Chienliu

Chio, Jinhong

Yen, Kaihsiang

Chang, Peizen

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-0032291589&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/341087

Type

conference paper