Improvement of Anodized Aluminum Oxide Process and Application in Solid-state Supercapacitor
Date Issued
2014
Date
2014
Author(s)
Liu, Lin-Yi
Abstract
Most nanostructures are fabricated using electron beam (E-Beam), reactive ion etching (RIE) with high-energy beam direct write lithography to achieve the production of sub-micron structures. The high cost and long processing time prevent the application of nanostructures in industry. Anodized Aluminum Oxide(AAO) can provide large-area ordered nano-pores at relatively low cost.
This study first attempts to improve the process. There are 2 type substrates used. One is aluminum of high purity : 99.999%(5N) and 99.5%(2N). The other is standard aluminum 1050 and 5052 that are used in the industry. Conventional AAO used the same electrolyte for the first and second anodizations. In this study, different electrolytes are used: 0.3M oxalic acid in the first anodization and 0.1M phosphoric acid in the second (and third) anodization . This different solution treatment has better arrangement than the conventional two-step process using the same electrolyte. Furthermore, by using Taguchi method, we optimize the gas-assisted hot embossing process for fabrication of the best nano-pillar on PC films. This nanostructures produced in polycarbonate film (PC film) surface can reduce the reflectivity to 0.99 %.
A solid-state supercapacitors using PC film of nanostructures as electrodes for TiO2 nanoparticle was made. The specific capacitance of the supercapacitors with the best nanopillar structures as electrode is 0.148 μF/cm2 ( 0.198 mF/g )﹐while that without nanostructures is 0.0075 μF/cm2 ( 0.00392 mF/g ). This study proves the potential of using AAO nanostructures for enhancing the capacitance of solid-state supercapacitors.
Subjects
陽極氧化鋁
氣體輔助成型
可撓性
固態電解質
超級電容
Type
thesis
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