Etching-behavior Study of Single Crystal Quartz and Design of Quartz Resonator
Date Issued
2010
Date
2010
Author(s)
Yeh, Hsing-Fang
Abstract
The purpose of this thesis is to study the etching behavior ofα-quartz. We can decide miller indices of lattice planes of etched quartz by measuring the intersecting angles between lattice planes. Using the two dimensional etch theory and measuring the time rate of length can calculate the etch rates of lattice planes. In this thesis, we also design the geometry and size of double-ended tuning fork quartz resonator such that the nature frequency of the first flexible mode matches the requirement of 35kHz.
Subjects
α-quartz
two dimensional etch theory
miller indices
quartz oscillator
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