Nanolithography on Silicon Surface Using a Tuning-fork STM/AFM
Resource
Optical Engineering for sensing and Nanotechnology (ICOSN), Yokohama(2001)
Journal
Optical Engineering for sensing and Nanotechnology (ICOSN)
Pages
-
Date Issued
2001
Date
2001
Author(s)
Hsia Yu Lin
Chi Ching Fang
Tsai, Din Ping
Type
conference paper