A non-delta-chrome OPC methodology for nonlinear process models

Journal

The 54th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Pages

6-162017/6/16

Date Issued

2010-06

Author(s)

Philip C. W. Ng

Kuen-Yu Tsai

Lawrence S. Melvin III

URI

Type

conference paper