Electrical characteristics analysis at "oxide flat-band voltage" for Al-SiO 2-Si capacitor

Journal

ECS Transactions

Journal Volume

35

Journal Issue

4

Pages

639-650

Date Issued

2011

Author(s)

Lu, H.-W.

Chen, T.-Y.

Hwu, J.-G.

DOI

10.1149/1.3572310

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-79960853269&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/363035

Type

conference paper