Stepped-tuning optical diaphragm fabricated with a lithography-less process
Journal
2018 IEEE Intl. Conf. on Optical MEMS and Nanophotonics
Pages
EM6.8.24
Date Issued
2018
Author(s)
Abstract
In this paper, we demonstrate a lithography-less process to fabricate a solid stepped-tuning diaphragm with a decent driving voltage. The device is designed to switch between two aperture sizes, 6 mm and 10 mm.
Type
conference paper