Nanopatterning on silicon wafers using AFM-based lithography-for solar cells

Journal

Journal of Nanoscience and Nanotechnology

Journal Volume

9

Journal Issue

3

Pages

1696-1700

Date Issued

2009

Author(s)

Lu, H.-H.

Hsiao, T.-C.

Hsu, S.-M.

DOI

10.1166/jnn.2009.SI08

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486210

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-67649200861&doi=10.1166%2fjnn.2009.SI08&partnerID=40&md5=5c8ddf1f1270cca71930769fe1f48b62

Type

conference paper