Cost-effective and channel-scalable hardware decoders for multiple electron-beam direct-write systems

Journal

Journal of Micro/Nanolithography, MEMS, and MOEMS

Journal Volume

17

Journal Issue

3

Date Issued

2018

Author(s)

Chun-Chang Yu

Pei-Chun Lin

Yi-Chang Lu

Charlie Chung-Ping Chen

DOI

10.1117/1.jmm.17.3.031202

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/429945

Type

journal article