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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Focused helium ion beam applications in advanced-node nanolithography R/D
Details
Focused helium ion beam applications in advanced-node nanolithography R/D
Journal
1st Annual Zeiss Process Control Innovations Seminar (PCIS)
Date Issued
2018
Author(s)
Chien-Lin Lee
Sheng-Wei Chien
Kuen-Yu Tsai*
KUEN-YU TSAI
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/429892
Type
conference paper
