Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises

Journal

Journal of Optics (United Kingdom)

Journal Volume

16

Journal Issue

6

Date Issued

2014

Author(s)

Lee, Y.-M.

Li, J.-H.

Wang, F.-M.

Cheng, H.-H.

Shen, Y.-T.

Tsai, K.-Y.

Shieh, J.J.

DOI

10.1088/2040-8978/16/6/065706

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451452

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84901999563&doi=10.1088%2f2040-8978%2f16%2f6%2f065706&partnerID=40&md5=079b9b94edd70dde79f5825b01f2e071

Type

journal article