Study of Separable Diaphragm Micro-pump Actuated by Circular Bimorph Piezo Disk
Date Issued
2015
Date
2015
Author(s)
Yu, Ning-Hsiang
Abstract
In this study, a separable piezoelectric micro-pump which can be applied in medical and chemical infusion was presented. The structure includes nozzle/diffuser for valveless design, the plunger and a diaphragm for delivering the kinetic energy to fluid, and a circular bimorph piezo disk for offering sufficient force. Also, in purpose to easily test the influence of parameters, the separable pump was formed through assembly. Further, glue spreading can assure airtight character and diaphragm smoothness. Five parameters such as working frequency, diaphragm properties, the thickness of the passive plate in the actuator, ratio of plunger diameter to chamber diameter(Piston ratio, P), and chamber diameter are analyzed to evaluate the performance of the micro-pump. Eventually, the optimal micro-pump has been tested about its flow rate stability and pumping head. The experimental results indicate that plastic material is more appropriate than elastomer for separable pump, the thinner passive plate can perform bigger deflection, and different chamber diameter should combine with different Piston ratio to create more flow-rate. As a result, the optimal combination for the separable pump was achieved with 0.2mm thickness of the passive plate, 0.1 mm thickness PET diaphragm, 0.67 Piston ratio, 15mm chamber diameter, and working frequency in 45Hz. Maximum flow-rate can reach 7.5 ml/min while the maximum pumping head is 1.5kPa, also, the relative errors can be controlled in 5%.
Subjects
disposable
piezoelectric
circular bimorph piezo disk
micro-pump
valveless
plunger
Type
thesis
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