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College of Engineering / 工學院
Engineering Science and Ocean Engineering / 工程科學及海洋工程學系
Solving the electrostatic field in large-scale electron-beam direct-write lithography system
Details
Solving the electrostatic field in large-scale electron-beam direct-write lithography system
Journal
Miniworkshop on Computational Science and Engineering
Date Issued
2011
Author(s)
Yen?Min Lee
JIA-HAN LI
Kuen?Yu Tsai
Tony Wen?Hann Sheu
Jia?Yush Yen
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/590895
Type
conference paper
