Bottleneck-centric pull and push allocation and sequencing of wet-bench and furnace tools

Journal

2013 e-Manufacturing and Design Collaboration Symposium

Date Issued

2013

Author(s)

Kao, Y.-T.

Zhan, S.-C.

SHI-CHUNG CHANG

DOI

10.1109/eMDC.2013.6756048

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84898034080&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/380220

Type

conference paper