Structural design and analysis of a nano-positioning planar motion stage

Journal

World Congress on Intelligent Control and Automation

Pages

833-838

Date Issued

2011

Author(s)

DOI

10.1109/WCICA.2011.5970632

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-80052401107&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/362672

SDGs

[SDGs]SDG7

Type

conference paper