The real demonstration of High-Quality Carbon Nano-Tubes (CNTs) as the electrical connection for the potential application in a vertical 3D integrated technology
Journal
Proceedings - Electronic Components and Technology Conference
Journal Volume
2020-June
Pages
1573-1578
Date Issued
2020
Author(s)
Lu, P.-Y.
Li, Y.-R.
Yen, C.-M.
Hung, H.-T.
Kao, C.-R.
Pu, W.-C.
Chen, C.-C.A.
Lee, M.-H.
Type
conference paper