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Research Center / 研究中心
University-Level Research Centers / 校級研究中心
Center for Condensed Matter Sciences / 凝態科學研究中心
Ion Beam Sputtered Growth and Mechanical Properties of SiCN Films
Details
Ion Beam Sputtered Growth and Mechanical Properties of SiCN Films
Journal
Materials Science and Engineering
Journal Volume
33
Pages
38
Date Issued
2001
Author(s)
C. T. Wang
K. J. Ma
K. H. Chen
L. C. Chen
P. D. Kichambare
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/503898
Type
journal article