Bonding characterization, density measurement, and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin films

Journal

Journal of Applied Physics

Journal Volume

92

Journal Issue

9

Pages

5150?-5158

Date Issued

2002

Author(s)

S. Chattopadhyay

S. C. Chien

S. T. Lin

K. H. Chen

DOI

URI

Publisher

American Institute of Physics Inc.

Type

journal article