The roles of hydrophobic group on the surface of ultra low dielectric constant porous silica film during thermal treatment

Resource

Thin Solid Films 515 (18): 7275-7280

Journal

Thin Solid Films

Journal Volume

515

Journal Issue

18

Pages

7275-7280

Date Issued

2007

Date

2007

Author(s)

Luo, Jen-Tsung

Wu, Wen-Fa

Wen, Hua-Chiang

Wan, Ben-Zu

Chang, Yu-Ming

Chou, Chang-Pin

Chen, Jun-Ming

Chen, Wu-Nan

URI

Type

journal article

File(s)

Name

37.pdf

Size

899.16 KB

Format

Adobe PDF

Checksum

(MD5):241d7d64d831852c82710d6842439bc9