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College of Science / 理學院
Applied Physics / 應用物理研究所
ETCH Rate and Thickness Measurements of Layered GaAs, AlAs and AlGaAs Structures Using a Laser Reflectance Technique
Details
ETCH Rate and Thickness Measurements of Layered GaAs, AlAs and AlGaAs Structures Using a Laser Reflectance Technique
Journal
MRS Proceedings
Journal Volume
340
Pages
227
Date Issued
1994
Author(s)
Grober, Louise H
MINGHWEI HONG
Grober, RD
Mannaerts, JP
Freund, RS
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/308663
Type
journal article
