Fabrication of free-space MOEM Device by CMOS Process
Resource
Tamkang Journal of Science and Engineering,7(2),73-76.
Journal
Tamkang Journal of Science and Engineering
Journal Volume
7
Journal Issue
2
Pages
73-76
Date Issued
2004
Date
2004
Author(s)
Cheng, Y.-C.
Lee, C.-Y.
Dai, C.-L.
Chen,W.-J.
Chang, P.-Z.
Chen, Ping-Hei
Type
journal article