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College of Electrical Engineering and Computer Science / 電機資訊學院
Photonics and Optoelectronics / 光電工程學研究所
Vertical electrothermal actuator with separated metal and nitride structural layers
Details
Vertical electrothermal actuator with separated metal and nitride structural layers
Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
Journal Volume
8
Journal Issue
2
Date Issued
2009
Author(s)
Tsai, J.-C.
Lai, R.-J.
Yin, C.-Y.
Chen, D.-S.
Shen, C.-K.
Chang, Y.-T.
JUI-CHE TSAI
DOI
10.1117/1.3100208
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-79960058626&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/350104
Type
journal article