Effect of force control algorithms on the scanning probe microscope lithography system
Resource
Review of Scientific Instruments 76 (3): 036103
Journal
Review of Scientific Instruments
Journal Volume
76
Journal Issue
3
Date Issued
2005
Author(s)
Abstract
This letter addresses the servo issue in the scanning probe microscope (SPM) lithography. The performance of the probe controller affects the ability of the lithography system to form uniform marks on the sample surface. Different control algorithms are tested on a commercial SPM system. The tests include the controller from the original system, a proportional integral differential controller, and a modern μ controller. The design procedure for the μ controller is described. The experimental results show that carefully tuned controllers are able to suppress the undesirable vibrations, and the μ controller achieves the most uniform lithography marks.
Type
journal article