Fluorinated aminoalkoxide CuII complexes: New CVD precursors for deposition of copper metal
Journal
Journal of Materials Chemistry
Journal Volume
12
Journal Issue
12
Pages
3541-3550
Date Issued
2002
Author(s)
Chi, Y.
Hsu, P.-F.
Liu, C.-S.
Ching, W.-L.
Chou, T.-Y.
Carty, A.J.
Lee, G.-H.
Chuang, S.-H.
Type
journal article