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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Preparation of fluorinated gate oxides by liquid phase deposition following rapid thermal oxidation
Details
Preparation of fluorinated gate oxides by liquid phase deposition following rapid thermal oxidation
Journal
Applied Physics Letters
Journal Volume
66
Date Issued
1995
Author(s)
JENN-GWO HWU
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-36449006319&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/314477
Type
journal article