Fabrication of Lithium Niobate Optical Ridge Waveguides Using Mixed-Source Proton-Exchange Wet-Etching
Date Issued
2008
Date
2008
Author(s)
Tseng, Wei-Hua
Abstract
Mixed pyrophosphoric acid and adipic acid are used as the solution for protonexchange in LiNbO3. For testing, the proton exchanged areas are obtained by using various temperatures and times. Then, the exchanged areas are wet etched with mixed hydrofluoric acid and nitric acid to reveal ridge structures for optical waveguide devices. Scanning electro microscopy is then used to investigate the end faces of the ridge structures and measure the aspect ratios. Moreover, the etched surfaces are scanned by atomic force microscopy to make sure if the overall roughness is small enough for the fabrication of devices for optical communication. For optical characterization, ridge-type S-bend waveguides are fabricated for measuring the transmission ratios to confirm the optical confinement of ridge structures, experimental results show that the steeper ridge structure fabricated by the proposed proton-exchange source can give rise to larger optical transmission ratio.Moreover, the optical transmission loss is measured by the cut-back method to study the effect of surface roughness on the transmission ratio.
Subjects
lithium niobate
optical ridge waveguide
integrated optics
proton exchange
wet etching
Type
thesis
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