Family-based scheduling rules of a sequence-dependent wafer fabrication system

Journal

IEEE Transactions on Semiconductor Manufacturing

Journal Volume

16

Journal Issue

1

Date Issued

2003

Author(s)

CHING-CHIN CHERN

Liu Y.-L.

DOI

10.1109/TSM.2002.807742

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0037325947&doi=10.1109%2fTSM.2002.807742&partnerID=40&md5=ba15611ec503d516ad2bb6fe54dac90a

https://scholars.lib.ntu.edu.tw/handle/123456789/457985

Type

journal article