Coupled-domain nonlinear macromodels and pull-in characteristics with electro-thermal effect
Resource
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Journal
12th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages
-
Date Issued
2003-06
Date
2003-06
Author(s)
DOI
N/A
Abstract
In this paper, we describe an efficient coupled-domain nonlinear macromodeling method for microsystems, and present the study of electro-thermal effects on the pull-in characteristic for a fixed-fixed beam by using this approach. The macromodeling method applies both the Karhunen-Loeve/Galerkin technique and the Arnoldi technique. The compact models generated by these two techniques are successfully integrated and tested. The application of the macromodels are demonstrated and discussed. Experimental verification for the simulated results is also provided.
Type
journal article
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