High tuning range and low pull-in voltage MEMS tunable capacitors filled with liquid crystal materials

Journal

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Pages

216-219

Date Issued

2010

Author(s)

Lin, C.-W.

Chen, Y.-J.

Lee, C.-W.

Shih, W.-P.

DOI

URI

URL

Type

conference paper