Control of a high precision positioning stage
Journal
Proceedings of the 2012 7th IEEE Conference on Industrial Electronics and Applications, ICIEA 2012
Pages
931-935
Date Issued
2012
Author(s)
Abstract
Control of a two dimensional high precision positioning stage is presented in this work. This stage is composed by two kinds of stages, a two degrees-of-freedom (DOF) (X and Y) linear cross roller guideway supported stage and a 4-DOF (Z, θx, θy and θz) piezo-stage. Two linear shaft voice coil motor are used to actuate the roller guided X-Y stage and five piezoelectric actuators are used in the piezo-stage. The positioning range of the X-Y stage is 25 mm x 25 mm and the piezo-stage is designed to compensate the vertical position, row, pitch and yow errors throughout the whole working range. A 6-DOF optical measurement system that consists of three laser interferometers and two quadrant photo-diodes is used to measure the attitude of the stage. The resolution of this measurement system is about 9.8 nm and 0.1 arc second. Integral sliding-mode controllers are used to control the linear motor driven stage while PID controllers are used to control the piezo-stage. Experimental results show that the positioning uncertainty is about ±20 nm. ? 2012 IEEE.
Subjects
PID controllers
piezo-stage
Precision stage
six-degrees-of-freedom
Sliding mode controller
Voice coil motors
Electric control equipment
Industrial electronics
Laser interferometry
Measurements
Optical data processing
Piezoelectric actuators
Proportional control systems
Sliding mode control
Three term control systems
Piezoelectric motors
Type
conference paper