Optical-Constant Tunable (ZrO2)x/(Cr2O3)y/(Al2O3)1-x-y Optical Superlattice for APSM in ArF Lithography

Optical-Constant Tunable (ZrO₂)_x/(Cr₂O₃)_y/(Al₂O₃)_1-x-y Optical Superlattice for APSM in ArF Lithography

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

19

Journal Issue

6

Pages

2617-2620

Date Issued

2001-11

Author(s)

F. D. Lai

L. A. Wang

DOI

URI

Type

journal article