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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A high precision focus probe for the quality assessment of grating pitch
Details
A high precision focus probe for the quality assessment of grating pitch
Journal
Key Engineering Material
Journal Issue
339
Pages
200-205
Date
2007
Author(s)
Chen, Yejin
Fan, K. C.
Liu, Yusheng
Cheng, Fang
URI
http://ntur.lib.ntu.edu.tw//handle/246246/222131
Type
journal article
