Capacitive micro pressure sensors with underneath readout circuit using a standard CMOS process

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

4334

Pages

336-344

Date Issued

2001

Author(s)

Chang, S.-C.

Dai, C.-L.

Chiou, J.-H.

DOI

10.1117/12.436619

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486858

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035171402&doi=10.1117%2f12.436619&partnerID=40&md5=d810b060bd37d9e0af716f17dede7bdf

Type

conference paper