Development of an Integrated DNA Detection System Using CMOS-MEMS Technology
Date Issued
2006
Date
2006
Author(s)
Cheng, Yi-Ting
DOI
en-US
Abstract
An integrated DNA detection system using CMOS-MEMS technology was developed in this thesis. The integrated DNA detection system includes two parts: 1. CMOS biochip: The CMOS biochip, which is fabricated by TSMC 0.35 um 2P4M standard CMOS process combined with post-micromachining processes, is composed of DNA biosensors (microelectrodes), a current amplifier circuit, and a temperature system for single base pair mismatch detection. 2. Integrated microfluidic device: A glass substrate where the CMOS biochip was bonded and a PDMS microfluidic chip.
A novel technique using a self-assembly method combined with cascode current mirrors to amplify electrical signals is presented. The electric current passing through the gold nanoparticle multilayer, which is formed by complementary target DNA, exceeds that through the gold nanoparticle monolayer by three orders of magnitude. The lowest detectable concentration of target DNA on this biochip is 0.1 nM. After being amplified by the current mirrors, the electrical signal of the multilayer gold nanoparticle structure over a nanogap is successfully amplified to the level of mA and can then be measured by a commercial Volt-ohm-Milliammeter. With temperature sensors and heaters, single mutation of target DNA could be distinguished by about 2oC difference in melting temperature. Finally, after the combination of CMOS biochip and PDMS microfluidic chip, the whole DNA detection system can be portable and the ability of automation can be also increased.
Subjects
CMOS
DNA 檢測
奈米金粒子
自組裝
電流放大器
單一鹼基錯位
微流體晶片
DNA detection
gold nanoparticles
self-assembly
current amplifier
single base pair mismatch
microfluidic chip
Type
thesis
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