Enhancement of micromechanical resonator manufacturing precision via mechanically-coupled arraying

Journal

2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum

Pages

58-63

Date Issued

2009

Author(s)

Lin, Y.

Li, W.-C.

Kim, B.

Lin, Y.-W.

Ren, Z.

Nguyen, C.T.-C.

DOI

URI

URL

Type

conference paper