Errutum: Multifunction thermopile sensors fabricated with a MEMS-compatible process (IEEE Transactions on Semiconductor Manufacturing 2013) 26:2 (242-247))

Journal
IEEE Transactions on Semiconductor Manufacturing
Journal Volume
26
Journal Issue
3
Date Issued
2013
Author(s)
Sin, L.-M.
Pan, T.-T.
Tsai, C.-W.
Chou, C.-F.
Hong, J.-Q.
Tsai, J.-C.
DOI
URI
Abstract
The word "temperature" was misspelled on pages 3 and 4. In Section III-B, the last paragraph should read: We define the sensitivity to CO 2 partial pressure change as, again, the slope of the curve (absolute value taken). The
Type
journal article

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