A four-degrees-of-freedom microstage for the compensation of eccentricity of a roundness measurement machine
Journal
International Journal of Machine Tools and Manufacture
Journal Volume
44
Journal Issue
4
Pages
365-371
Date Issued
2004
Author(s)
Abstract
This paper contains a description of four-degrees-of-freedom microstage, designed to replace manual adjustment mechanism in a roundness measurement machine for the compensation of eccentricity. Four-degrees-of-freedom motion (two-translational and two-rotational motion) was obtained by four piezoelectric actuators that were set up on the same plane to minimize the effect of the abbe's offset. The microstage was fixed on a rotary table to compensate not only for the x- and y-position errors, but also for the angle errors about the x- and y-axis. Repeatability, calibration and experimental tests were carried out and the results showed the proposed design was easy to assemble for most types of roundness test machines and had sufficient capability to compensate for the eccentricity. ? 2003 Elsevier Ltd. All rights reserved.
Subjects
Actuators
Calibration
Error analysis
Machine design
Piezoelectric devices
Rotation
Semiconductor lasers
Eccentricity
Microstage
Roundness test machine
Self-compensation
Degrees of freedom (mechanics)
SDGs
Type
journal article