半導體產業中製程監控之取樣策略
Date Issued
1998
Date
1998
Author(s)
DOI
872213E002039
Abstract
In-line inspections are very important steps in
semiconductor manufacturing processes. Due to the
significant amount of value added on a wafer at each
process step, the in-line inspection has become a
crucial means to detect process excursions and to
improve the manufacturing yield. An effective
sampling strategy will help to achieve these goals.
However, the complex nature of the manufacturing
processes and the inspection technologies makes the
data sampling an intricate task. In this project, we
develop an integrated sampling strategy. Particularly,
we focus on the strategy to achieve effective statistical
process control (SPC) and process excursion
investigation. To accomplish this, some key factors
should be taken into considerations to determine a
rational subgrouping strategy and to minimize the total
cost. A rational subgroup is an inspection sample that
is taken in-line and represents a homogeneous group
within which sample measurements vary due only to a
constant system of common causes. Choosing an
effective rational subgrouping strategy and
constructing corresponding control charts can
maximize the power of the control chart and minimize
the excursion investigation efforts. In addition to
rational subgrouping and control chart construction
strategies, we also need to consider the trade-off
between the yield and the inspection cost. To make the
inspection scheme more cost-effective, inspection
points for critical process steps (layers) should be
determined. The objective of this project is to
develop an integrated sampling and chart construction
approaches that maximize the power of SPC charts
and minimizes the costs of inspections and yield loss
in IC fabrication processes.
Subjects
sampling strategy
SPC
yield improvement
In-line inspection
Publisher
臺北市：國立臺灣大學工業工程學研究所
Type
report
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