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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Modeling gas damping and spring phenomena in MEMS with frequency dependent macro-models
Details
Modeling gas damping and spring phenomena in MEMS with frequency dependent macro-models
Journal
IEEE Micro Electro Mechanical Systems
Pages
365-368
Date Issued
2001
Author(s)
Yang, Y.-J.
Kamon, M.
Rabinovich, V.L.
Ghaddar, C.
Deshpande, M.
Greiner, K.
Gilbert, J.R.
YAO-JOE YANG
DOI
10.1016/B978-008043944-0/50933-1
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/448560
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-0034998906&doi=10.1016%2fB978-008043944-0%2f50933-1&partnerID=40&md5=fcfa23be8b3934e6b5f1969624d77071
Type
journal article