Modeling gas damping and spring phenomena in MEMS with frequency dependent macro-models
Journal
IEEE Micro Electro Mechanical Systems
Pages
365-368
Date Issued
2001
Author(s)
Abstract
In this paper, we present an efficient macromodel extraction technique for gas damping and spring effects for arbitrarily shaped MEMS devices. The technique applies an Arnoldi-based model-order-reduction algorithm to generate low-order models from an FEM approximation of the linearized Reynolds equation. We demonstrate that this approach for generating the frequency-dependent gas-damping model is more than 100 times faster than previous approaches, which solves the linearized Reynolds equation using a transient FEM solver. The low-order gas-damping model can be easily inserted into a system-level modeling package for transient and frequency analysis. The simulated results are in good agreement with experimental results for four different devices.
In this paper, we present an efficient macromodel extraction technique for gas damping and spring effects for arbitrarily shaped MEMS devices. The technique applies an Arnoldi-based model-order-reduction algorithm to generate low-order models from an FEM approximation of the linearized Reynolds equation. We demonstrate that this approach for generating the frequency-dependent gas-damping model is more than 100 times faster than previous approaches, which solves the linearized Reynolds equation using a transient FEM solver. The low-order gas-damping model can be easily inserted into a system-level modeling package for transient and frequency analysis. The simulated results are in good agreement with experimental results for four different devices.
Type
journal article