Rapidly Selective Growth of Nanoparticles by Electron-Beam and Optical Lithographies with Chemically Amplified Resists

Resource

Electrochemical and Solid-State Letters 8 (2): G54-G56

Journal

Electrochemical and Solid-State Letters

Journal Volume

8

Journal Issue

2

Pages

-

Date Issued

2005

Date

2005

Author(s)

Chen, H. L.

Chu, Y. H.

Kuo, C. I.

Liu, F. K.

Ko, F. H.

Chu, T. C.

URI

Type

journal article

File(s)

Name

22.pdf

Size

553.75 KB

Format

Adobe PDF

Checksum

(MD5):fb2137c01fb1dd657874af93cb9b3578