Experiment and Electrical Model of Titanic Nano-Complex Oxide Thin Film for Ultra-Sensitive Humidity Sensor
Date Issued
2015
Date
2015
Author(s)
Huang, Wen-Shen
Abstract
A highly sensitive humidity sensor is demonstrated by using a novel titanic nano-complex(Fe-N-TiOx) thin film as the sensing layer coated on the Au interdigitated electrode. Both sensing materials, TiOx and Fe-N-TiOx, were fabricated by the sol-gel method and the ratio of iron, nitrogen and titanic oxide can be adjust by controlling the concentration of Urea and iron (III) chloride hexahydrate. The geometric structure of sensing material is fiber-like, and water molecular was adsorbed around the material and the water layer was gradually formed with increasing relativity humidity (RH) . After comparing the response between TiOx and co-modified TiOx, the sensors using co-modified TiOx has much better performance than sensors using pure TiOx. Therefore, in our research, we would focus on the behavior of co-modified TiOx material. For co-modified TiOx, due to the strong absorption for water molecules on the sensing layer, the responded resistance greatly changes with an increasing humidity and the magnitude variation can be three orders of magnitude. In this thesis, we developed a parallel RC circuit model which accurately predicted the relation between sensing responses and ambient relative humidity. The developed physical model for the prediction of the sensor electrical characteristics was aligned well with the experimental results.
Subjects
Gas Sensor
Humidity Sensor
Iron,Nitrogen co-modified Titanium Oxide
Sol-Gel
RC Electrical Model
Type
thesis
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