Recipe-Independent Indicator for Tool Health Diagnosis and Predictive Maintenance

Journal

IEEE Transactions on Semiconductor Manufacturing

Journal Volume

22

Journal Issue

4

Pages

522-535

Date Issued

2009

Author(s)

Chen, A.

DOI

10.1109/TSM.2009.2028215

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/467319

URL

http://ieeexplore.ieee.org/document/5170100/

Type

journal article