Kinetic Energy Distributions of Sputtered Particles in Non-Cascade Sputtering Processes
Resource
The 6th International Conference on Ion Beam Analysis, Tempe, AZ(1983.05.23-05.27)
Journal
The 6th International Conference on Ion Beam Analysis, Tempe, AZ(1983.05.23-05.27)
Pages
-
Date Issued
1983
Date
1983
Author(s)
Lin, Sheng-Hsien
Type
book