High tuning range and low pull-in voltage micromachined tunable capacitor filled with liquid crystal
Resource
23th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010)
Journal
23th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010)
Pages
-
Date Issued
2010
Date
2010
Author(s)
Lin, C.-W.
Chen, Y.-J.
Lee, C.-W.
Shih, W.-P.
Chang, P.-Z.
Type
conference paper