A fully integrated wireless CMOS microcantilever lab chip for detection of DNA from Hepatitis B virus (HBV)
Journal
Sensors and Actuators, B: Chemical
Journal Volume
181
Pages
867-873
Date Issued
2013
Author(s)
Huang, C.-W.
Hsueh, H.-T.
Huang, Y.-J.
Liao, H.-H.
Tsai, H.-H.
Juang, Y.-Z.
Lin, T.-H.
Lu, S.-S.
Lin, C.-T.
Abstract
In this work, a fully integrated DNA detection system-on-a-chip (SoC) was implemented by 0.35 μm commercialized standard CMOS process for label-free and real-time detection of Hepatitis B virus (HBV) DNA. The chip implementation was achieved in the Taiwan Semiconductor Manufacturing Company's (TSMC) 0.35 μm CMOS process. The implemented chip size was 6 mm by 5 mm. It included microcantilever DNA sensors, readout circuits, a microcontroller unit (MCU), and an on-off key (OOK) wireless transceiver (TX/RX). The DNA sensing device, based on piezoresistive type microcantilever, was achieved by post processes after the standard CMOS circuit fabrication. The post processes included Au deposition to enhance its biocompatibility and reactive ion etching (RIE) to release the miscrocentilever. To evaluate the sensing device, the 19-mer nucleotide probe DNA of HBV conservative sequence was modified with thiol group to cross link onto the Au layer. To enhance the performance of the integrated SoC, furthermore, the oscillator-based self-calibrated readout circuit was designed and implemented. In addition, the wireless capability was accomplished by the OOK TX/RX. The experimental result revealed that the DNA detection SoC has good selectivity between one base-pair mismatched DNA and all matched DNA. This DNA SoC demonstrated the sensing limitation of 1 pM in the label-free DNA detection. ? 2013 Elsevier B.V.
Subjects
CMOS sensor; DNA biosensor; Integrated SoC; Microcantilever biosensor
SDGs
Other Subjects
CMOS sensors; Conservative sequences; DNA biosensors; Integrated SoC; Label-free and real-time detections; Microcantilever biosensors; Standard CMOS process; Taiwan semiconductor manufacturing companies; Application specific integrated circuits; Bandpass filters; Biocompatibility; Biosensors; CMOS integrated circuits; Composite micromechanics; Gold; Programmable logic controllers; Readout systems; Sensors; Viruses; DNA
Type
journal article